Alex Fritze: "Integration of Optoelectronic Devices, Electronic Circuitry and Optical Waveguides" PhD Thesis, Heriot-Watt University 2002 Abstract: This thesis explores the technological issues of optically interconnecting electronics by integrating optoelectronic devices with digital electronic circuitry and optical polymer waveguides on a common substrate, utilising direct-laser writing and polymer flip-chip bonding. The work is presented in the context of an optoelectronic crosspoint switch demonstrator, which will combine high-speed logic circuitry with vertical-cavity surface-emitting lasers (VCSELs), photodetectors and multimode waveguides. A study of "surface-normal" optoelectronic devices is presented. This work encompasses characterisation and modelling of multiple-quantum well modulators (MQWMs) by curve-fitting experimental data to a semi-empirical device model. For VCSELs, an analysis of the dynamic lasing behaviour under various pre-bias conditions is presented. Waveguide fabrication based on photopolymerisation of mulifunctional acrylate polymers utilising direct laser-writing is described. An experimental setup based on a 325nm HeCd laser and a mechanical translation stage is presented, and the writing process is modelled. Experimental results for multimode waveguides written in a PMMA/diacrylate-based polymer are presented. Tapered direct writing onto fibre-ends and direct writing of 45°-turning mirrors are explored as methods for interfacing waveguides to external components. A novel low-temperature compliant polymer flip-chip bonding process is presented. In this process, both fabrication of bumps and metallisation-masking are accomplished utilising the same direct laser-writing setup used for waveguide writing. The bump-formation process is characterised and experimental results of bumps written in a commercial photopolymer (Norland NOA-61) are presented. A process for integrating flip-chip bumping/metallisation and polymer waveguide fabrication is discussed.